@article{246126,
  author = {Bryan Barnes and Mark and Martin Sohn and Hui Zhou and Richard Silver},
  title = {Assessing form-dependent optical scattering at vacuum- and extreme-ultraviolet wavelengths off nanostructures with two-dimensional periodicity},
  year = {2019},
  number = {11},
  month = {2019-06-24},
  publisher = {Physical Review Applied},
  doi = {https://doi.org/10.1103/PhysRevApplied.11.064056},
  language = {en},
}