@conference{246121,
  author = {Bryan Barnes and Hui Zhou and Richard Silver and Mark},
  title = {Supplementing rigorous electromagnetic modeling with atomistic simulations for optics-based metrology},
  year = {2019},
  number = {11057},
  month = {2019-06-21},
  publisher = {Modeling Aspects in Optical Metrology VII, Munich, -1},
  doi = {https://doi.org/10.1117/12.2525115},
  language = {en},
}