@article{246106,
  author = {Roberto De and Christopher Wallin and Glenn Holland and Slava Krylov and Bojan Ilic},
  title = {Absolute deflection measurements in a micro- and nano-electromechanical Fabry-Perot interferometry system},
  year = {2019},
  number = {126},
  month = {2019-07-01},
  publisher = {Journal of Applied Physics},
  doi = {https://doi.org/10.1063/1.5094743},
  language = {en},
}