@conference{246071,
  author = {Ravikiran Attota and Hyeonggon Kang and Benjamin Bunday},
  title = {Nondestructive and Economical Dimensional Metrology of Deep Structures},
  year = {2019},
  month = {2019-04-01},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics (FCMN), Monterey, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927455},
  language = {en},
}