@article{245016, author = {David Olaya and Manuel Castellanos and Javier Pulecio and John Biesecker and Soroush Khadem and Theodore Lewitt and Peter Hopkins and Paul Dresselhaus and Samuel Benz}, title = {Planarized process for single-flux-quantum circuits with self-shunted Nb/NbxSi1-x/Nb Josephson junctions}, year = {2019}, number = {29}, month = {2019-02-18}, publisher = {IEEE Transactions on Applied Superconductivity}, doi = {https://doi.org/10.1109/TASC.2019.2900020}, language = {en}, }