@conference{244866,
  author = {Ndubuisi Orji},
  title = {Metrology requirements for next generation of semiconductor devices},
  year = {2019},
  month = {2019-04-04},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics (FCMN), Monterrey, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927435},
  language = {en},
}