@misc{244511, author = {James Maslar and William Kimes and Brent Sperling}, title = {Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition Processes}, year = {2019}, number = {124}, month = {2019-03-26}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/jres.124.005}, language = {en}, }