@book{242981,
  author = {John Dagata and H Kuramochi},
  title = {Local oxidation using dynamic force mode: Toward higher reliability and efficiency},
  year = {2011},
  month = {2011-06-15},
  publisher = {Springer, NY, NY},
  doi = {https://doi.org/10.1007/978-1-4419-9899-6_2},
  language = {en},
}