@conference{24151, author = {Jason Ryan and Richard Southwick and Jason Campbell and Kin Cheung and John Suehle}, title = {Frequency Dependent Charge Pumping -- A Defect Depth Profiling Tool?}, year = {2013}, month = {2013-01-31}, publisher = {IEEE International Integrated Reliability Workshop Final Report, South Lake Tahoe, CA}, language = {en}, }