@conference{24121,
  author = {Yaw Obeng and Chukwudi Okoro and Joseph Kopanski},
  title = {Metrology for Nanosystems and Nanoelectronics Reliability Assessments},
  year = {2012},
  month = {2012-08-20},
  publisher = {TBD, Birmingham, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911433},
  language = {en},
}