@article{241046,
  author = {Ndubuisi Orji and Mustafa Badaroglu and Bryan Barnes and Carlos Beitia and Benjamin Bunday and Umberto Celano and Regis Kline and Mark Neisser and Yaw Obeng and Andras Vladar},
  title = {Metrology for the next generation of semiconductor devices},
  year = {2018},
  number = {1},
  month = {2018-10-12},
  publisher = {Nature Electronics},
  doi = {https://doi.org/10.1038/s41928-018-0150-9},
  language = {en},
}