@article{240701,
  author = {Ravikiran Attota and Hyeonggon Kang and Keana Scott and Richard Allen and Andras Vladar and Bunday Benjamin},
  title = {Nondestructive shape process monitoring of three-dimensional high aspect ratio targets using through-focus scanning optical microscopy Optical Microscopy},
  year = {2018},
  number = {29},
  month = {2018-09-27},
  publisher = {Measurement Science and Technology},
  doi = {https://doi.org/10.1088/1361-6501/aae4c2},
  language = {en},
}