@article{239976,
  author = {James Liddle and Brian Hoskins and Andras Vladar and John Villarrubia},
  title = {Research Update: Electron beam-based metrology after CMOS},
  year = {2018},
  number = {6},
  month = {2018-07-19},
  publisher = {APL Materials},
  doi = {https://doi.org/10.1063/1.5038249},
  language = {en},
}