@conference{237666,
  author = {Gerard Henein and Juraj Topolancik and Kerry},
  title = {High Quality Oxide Films Deposited at Room Temperature by Ion Beam Sputtering},
  year = {2018},
  number = {3},
  month = {2018-02-05},
  publisher = {MRS Advances, Boston, MA},
  doi = {https://doi.org/10.1557/adv.2018.157},
  language = {en},
}