@book{236956, author = {Thomas Wallis and Pavel Kabos}, title = {Chapter 11. Dopant profiling in semiconductor nanoelectronics}, year = {2017}, month = {2017-09-17}, publisher = {Cambridge University Press, Cambridge, -1}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922346}, language = {en}, }