@article{236791,
  author = {Brent Sperling and James Maslar and Sergei Ivanov},
  title = {In situ infrared spectroscopy during La2O3 ALD using La(iPrCp)3 and H2O},
  year = {2018},
  month = {2018-04-26},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}