@conference{23656,
  author = {Lei Chen and Quandou Wang and Ulf Griesmann},
  title = {Plasma Etching Uniformity Control for Making Large and Thick Dual-Focus Zone Plates},
  year = {2011},
  month = {2011-01-11},
  publisher = {36th International Conference on Micro and Nano Engineering, Genoa, -1},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905958},
  language = {en},
}