@article{236166,
  author = {Joseph Hagmann and Xiqiao Wang and Pradeep Namboodiri and Jonathan Wyrick and Roy Murray and Michael Stewart and Richard Silver},
  title = {Weak localization thickness measurements of embedded phosphorus delta layers in silicon produced by PH3 dosing},
  year = {2018},
  month = {2018-01-23},
  publisher = {Physical Review Applied},
  language = {en},
}