@article{235366,
  author = {Norman Sanford and Paul Blanchard and Ryan White and Michael Vissers and Albert Davydov and D Diercks and David Pappas},
  title = {Laser-assisted atom probe tomography of Ti/TiN films deposited on Si},
  year = {2016},
  month = {2016-12-21},
  publisher = {Micron},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920857},
  language = {en},
}