@article{235271, author = {Xiqiao Wang and Joseph Hagmann and Pradeep Namboodiri and Jonathan Wyrick and Kai Li and Roy Murray and Frederick Meisenkothen and Alline Myers and Michael Stewart and Richard Silver}, title = {Quantifying Atom-scale Dopant Movement and Electrical Activation in Si:P Monolayers}, year = {2018}, month = {2018-01-26}, publisher = {Nanoscale}, doi = {https://doi.org/10.1039/C7NR07777G}, language = {en}, }