@article{23481, author = {Christine Mahoney and James Kushmerick and Kristen}, title = {Investigation of damage mechanisms in PMMA during ToF-SIMS depth profiling with 5 keV and 8 keV SF5+ primary ions.}, year = {2010}, number = {114}, month = {2010-09-02}, publisher = {Journal of Physical Chemistry C}, language = {en}, }