@conference{234651, author = {David Black and Donald Windover and Albert Henins and David Gil and James Filliben and James Cline}, title = {Standard Reference Material 640d for X-ray Metrology}, year = {2010}, month = {2010-06-01}, publisher = {Advances in x-ray analysis, proceedings of 58th DXC, Colorado Springs, CO}, language = {en}, }