@article{234211, author = {Shannon Hill and Nadir Faradzhev and Cedric Powell}, title = {Quantitative analysis of trace levels of surface contamination by X-ray photoelectron spectroscopy, Part I: statistical uncertainty near the detection limit}, year = {2017}, number = {49}, month = {2017-12-01}, publisher = {Surface and Interface Analysis}, doi = {https://doi.org/10.1002/sia.6285}, language = {en}, }