@inbook{233431,
  author = {Yaw Obeng and C. Garner and Dan Herr},
  title = {Metrology and Characterization Challenges for Emerging Research Materials and Devices},
  year = {2011},
  month = {2011-12-28},
  publisher = {Frontiers of Characterization and Metrology for Nanoelectronics: 2011, American Institute of Physics, TBD, MD},
  doi = {https://doi.org/10.1063/1.3657864},
  language = {en},
}