@article{233056,
  author = {Mark and Bryan Barnes and Hui Zhou},
  title = {Evaluating the Effects of Modeling Errors for Isolated Finite 3-D Targets},
  year = {2017},
  month = {2017-10-19},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  language = {en},
}