@inbook{232221,
  author = {Chukwudi Okoro and Yaw Obeng},
  title = {Impact of Thermal Stability of Isolation Liner on the Electrical Characteristics of TSVs},
  year = {2013},
  number = {45},
  month = {2013-07-30},
  publisher = {ECS Transactions (ECST), The Electrochemical Society, Pennington, NJ},
  doi = {https://doi.org/10.1149/1.3700887},
  language = {en},
}