@article{23156,
  author = {Daniel Sunday and Matthew Hammond and Chengqing Wang and Wen-Li Wu and Regis Kline and Gila Stein},
  title = {3D X-ray Metrology for Block Copolymer Lithography Line-Space Patterns},
  year = {2013},
  month = {2013-07-15},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  language = {en},
}