@article{231396, author = {Nien Zhang and Bryan Barnes and Hui Zhou and Mark and Richard Silver}, title = {Combining model-based measurement results of critical dimensions from multiple tools}, year = {2017}, number = {28}, month = {2017-04-07}, publisher = {Measurement Science and Technology}, doi = {https://doi.org/10.1088/1361-6501/aa5586}, language = {en}, }