@conference{230271,
  author = {Joseph Hagmann and Xiqiao Wang and Pradeep Namboodiri and Jonathan Wyrick and Roy Murray and Michael Stewart and Richard Silver and Curt Richter},
  title = {Towards single atom devices for quantum information and metrology: weak localization in embedded phosphorus delta layers in silicon},
  year = {2017},
  month = {2017-06-29},
  publisher = {59th Electronic Materials Conference, Notre Dame, IN},
  language = {en},
}