@article{228276, author = {Thomas Michels and Vladimir Aksyuk}, title = {Optical probe for nondestructive wafer-scale characterization of photonic elements}, year = {2017}, number = {29}, month = {2017-01-27}, publisher = {IEEE Photonics Technology Letters}, doi = {https://doi.org/10.1109/LPT.2017.2660439}, language = {en}, }