@conference{228221,
  author = {Joseph Kopanski and Lin You and Yaw Obeng},
  title = {Reference Materials to Enable Precise and Accurate Imaging with Electrical Scanning Probe Microscopes},
  year = {2017},
  month = {2017-03-21},
  publisher = {The 2017 International Conference on Frontiers of Characterization and Metrology for 
Nanoelectronics, Monterey, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922980},
  language = {en},
}