@book{227941,
  author = {Frank DelRio and Martin Dunn and Maarten de},
  title = {Van der Waals and capillary adhesion of polycrystalline silicon micromachined surfaces},
  year = {2012},
  month = {2012-08-09},
  publisher = {Springer Berlin Heidelberg, Heidelberg, },
  doi = {https://doi.org/10.1007/978-3-642-25414-7_14},
  language = {en},
}