@article{227771,
  author = {Mark Sobolewski and David Lahr},
  title = {Origin of Electrical Signals for Plasma Etching Endpoint Detection: Comparison of Endpoint Signals and Electron Density},
  year = {2012},
  number = {30},
  month = {2012-07-23},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}