@conference{227766,
  author = {Mark Sobolewski and J. Kim},
  title = {Electron heating in rf-biased, inductively coupled plasmas},
  year = {2008},
  month = {2008-07-15},
  publisher = {19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases, Granada, ES},
  language = {en},
}