@article{227631, author = {Regis Kline and Daniel Sunday and Donald Windover and Bunday Benjamin}, title = {X-ray Scattering Critical Dimensional Metrology using a Compact X-ray Source for Next Generation Semiconductor Devices}, year = {2017}, month = {2017-02-08}, publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS}, language = {en}, }