@article{227251,
  author = {James Maslar and John Hoang and William Kimes and Brent Sperling},
  title = {Measurements of Metal Alkylamide Density During Atomic Layer Deposition Using a Mid-Infrared Light Emitting Diode Source},
  year = {2015},
  number = {69},
  month = {2015-03-02},
  publisher = {Applied Spectroscopy},
  doi = {https://doi.org/10.1366/14-07695},
  language = {en},
}