@article{227246,
  author = {James Maslar and William Kimes and Brent Sperling},
  title = {Quantum Cascade Laser-Based Measurement of Metal Alkylamide Density During Atomic Layer Deposition},
  year = {2012},
  number = {66},
  month = {2012-03-01},
  publisher = {Applied Spectroscopy},
  doi = {https://doi.org/10.1366/11-06473},
  language = {en},
}