@article{227241,
  author = {William Kimes and James Maslar and Elizabeth Moore},
  title = {Perpendicular-Flow, Single-Wafer Atomic Layer Deposition Reactor Chamber Design for use with In Situ Diagnostics},
  year = {2012},
  number = {83},
  month = {2012-08-13},
  publisher = {Review of Scientific Instruments},
  doi = {https://doi.org/10.1063/1.4742991},
  language = {en},
}