@article{226721,
  author = {Daniel Josell and Thomas Moffat and Manoj Silva},
  title = {Superconformal Bottom-Up Cobalt Deposition in High Aspect Ratio Through Silicon Vias},
  year = {2016},
  month = {2016-11-11},
  publisher = {Journal of the Electrochemical Society},
  language = {en},
}