@conference{225536,
  author = {Shannon Hill and Nadir Faradzhev and Charles Tarrio and Thomas Lucatorto and T. Madey and B. Yakshinskiy and E. Loginova and S. Yulin},
  title = {Accelerated Lifetime Metrology of EUV Multilayer Mirrors in Hydrocarbon Environments},
  year = {2008},
  number = {6921},
  month = {2008-10-01},
  publisher = {Proceedings of SPIE:  Emerging Lithographic Technologies XII, San Jose, CA},
  language = {en},
}