@conference{225531,
  author = {Shannon Hill and Nadir Faradzhev and Charles Tarrio and Thomas Lucatorto and Robert Bartynski and B. and T.},
  title = {Measuring the EUV-induced contamination rates of TiO2-capped multilayer optics by anticipated production-environment hydrocarbons},
  year = {2009},
  number = {7271},
  month = {2009-10-01},
  publisher = {Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA},
  language = {en},
}