@article{223951,
  author = {Ndubuisi Orji and Ronald Dixson and Boon and Andras Vladar and Michael Postek},
  title = {Contour Metrology using Critical Dimension Atomic Force Microscopy},
  year = {2016},
  number = {15},
  month = {2016-12-15},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  doi = {https://doi.org/10.1117/1.JMM.15.4.044006},
  language = {en},
}