@article{223011,
  author = {Yung-Tsun Lee},
  title = {Process Control Model for Growth Rate of Molecular Beam Epitaxy of MgO (111) Nanoscale Thin Films on 6H-SiC (0001) Substrates},
  year = {2016},
  month = {2016-11-30},
  publisher = {International Journal of Advanced Manufacturing Technology},
  doi = {https://doi.org/10.1007/s00170-016-9674-1},
  language = {en},
}