@article{222606,
  author = {Ndubuisi Orji and Ronald Dixson and Domingo Garcia-Gutierrez and Bunday Benjamin and M Bishop and Michael Cresswell and Richard Allen and John Allgair},
  title = {Transmission Electron Microscope Calibration Methods for Critical Dimension Standards},
  year = {2016},
  number = {15},
  month = {2016-10-13},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  doi = {https://doi.org/10.1117/1.JMM.15.4.044002},
  language = {en},
}