@article{222591,
  author = {Erich Grossman and Martin Gould and Natalie Mujica-Schwahn},
  title = {Robust evaluation of statistical surface topography parameters using focus-variation microscopy},
  year = {2016},
  number = {4},
  month = {2016-09-19},
  publisher = {Surface Topography: Metrology and Properties},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919854},
  language = {en},
}