@misc{222551,
  author = {Grady White and Adrian Verwolf and Chris Poling and Nicholas Barbosa and Nikki Rentz},
  title = {Potential Stable Low-Permeation Rate Standard Based on Micro-machined Silicon},
  year = {2015},
  number = {120},
  month = {2015-12-15},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/jres.120.021},
  language = {en},
}