@inbook{220121,
  author = {Michael Postek},
  title = {Photomask Critical Dimension Metrology in the Scanning Electron Microscope, Chapter in: Handbook of Mask Making Technology, Edited by: Syed Rizvi},
  year = {2004},
  month = {2004-04-07},
  publisher = {Handbook of Mask Making Technology, Edited by: Syed Rizvi, , },
  language = {en},
}