@book{220081,
  author = {Christopher Soles and Hae-Jeong Lee and B Vogt and Eric Lin and Wen-Li Wu},
  title = {Structure Characterization of Nanoporous Interlevel Dielectric Thin Films With X-Ray and Neutron Radiation},
  year = {2007},
  month = {2007-03-06},
  publisher = {Dielectric Films for Advanced Microelectronics   Book Chapter| John Wiley and Sons Publisher, },
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852526},
  language = {en},
}