@article{218776, author = {Craig Copeland and Craig McGray and Jon Geist and Vladimir Aksyuk and Samuel Stavis}, title = {Transfer of motion through a microelectromechanical linkage at nanometer and microradian scales}, year = {2016}, number = {2}, month = {2016-09-12}, publisher = {Microsystems & Nanoengineering}, doi = {https://doi.org/10.1038/micronano.2016.55}, language = {en}, }