@article{218646,
  author = {Martin Sohn and Bryan Barnes and Richard Silver},
  title = {Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy},
  year = {2018},
  number = {156},
  month = {2018-03-01},
  publisher = {Optik},
  doi = {https://doi.org/10.1016/j.ijleo.2017.11.206},
  language = {en},
}